Semiconductor memory

ABSTRACT

A semiconductor memory is achieved which allows a reduction in the area of a memory array block without reducing the gate widths of floating gates. A plurality of select gates extend in straight lines in the X direction. Between the upper- and lower-side select gates, two rows&#39; worth of floating gates are arranged. The plurality of floating gates are placed in a staggered arrangement (in other words, in a zigzag pattern). That is, looking at one floating gate in a specific column and another floating gate in a column adjacent to that specific column, those floating gates deviate from each other in the Y direction.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to semiconductor memories, and especiallythose including select gates and floating gates.

2. Description of the Background Art

Semiconductor memories include a memory array block in which a pluralityof memory cells are arranged in a matrix of rows and columns.

Regarding the top surface layout of a memory array block, conventionalsemiconductor memories include a select gate extending in the rowdirection and a plurality of floating gates spaced from each other andparallel to the select gate. That is, in conventional semiconductormemories, a plurality of floating gates are spaced from each other in astraight line.

The structures of and control techniques for those semiconductormemories are disclosed, for example, in the following patent documents:Japanese Patent Application Laid-open Nos. 5-326886 (1993), 2002-329398,and 2001-156275.

However, in the above conventional semiconductor memories, since theplurality of floating gates are placed side by side in a straight line,a space of more than the design rule must be left between each twoadjacent floating gates, which results in the problem of increased areaof the memory array block.

Further, if the gate widths of the floating gates are reduced in orderto reduce the area of the memory array block, the amount of currentoutputted from memory cells in data read operations is reduced. Thisresults in another problem of difficulty of judgment by a senseamplifier.

SUMMARY OF THE INVENTION

An object of the present invention is to achieve a semiconductor memorywhich allows a reduction in the area of a memory array block withoutreducing the gate widths of floating gates.

According to a first aspect of the present invention, the semiconductormemory includes a select gate extending in a first direction and aplurality of floating gates coupled with the select gate. The pluralityof floating gates include first and second floating gates. The secondfloating gate is arranged adjacent to the first floating gate anddeviating from the first floating gate in a second directionperpendicular to the first direction.

Thus, it is possible to reduce the area of the memory array blockwithout reducing the gate widths of the plurality of floating gates.

According to a second aspect of the present invention, the semiconductormemory includes a select gate formed in a meandering pattern and aplurality of floating gates coupled with the select gate. The pluralityof floating gates include first and second floating gates. The firstfloating gate is arranged to have its gate width defined along a firstdirection. The second floating gate is arranged to be adjacent to thefirst floating gate and to have its gate width defined along a seconddirection perpendicular to the first direction.

Thus, it is possible to reduce the area of the memory array blockwithout reducing the gate widths of the plurality of floating gates.

These and other objects, features, aspects and advantages of the presentinvention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram showing the structure of a memory moduleaccording to a first preferred embodiment of the present invention;

FIGS. 2 and 3 are top views showing, in partial cutaway, a layoutpattern of a memory array block according to the first preferredembodiment of the present invention;

FIG. 4 is a cross-sectional view showing a sectional structure takenalong line IV-IV of FIG. 3;

FIG. 5 is a circuit diagram showing the equivalent circuit of a memorycell;

FIG. 6 is a top view showing, in partial cutaway, a layout pattern of aconventional memory array block;

FIGS. 7 to 9 are top views showing, in partial cutaway, a layout patternof a memory array block according to a second preferred embodiment ofthe present invention;

FIG. 10 is a cross-sectional view showing a sectional structure takenalong line X-X of FIG. 9;

FIG. 11 is a cross-sectional view showing a sectional structure takenalong line XI-XI of FIG. 9;

FIG. 12 is a circuit diagram showing the equivalent circuit of a memorycell;

FIG. 13 is a circuit diagram specifically showing the circuitconfiguration of a source selection gate shown in FIG. 1;

FIG. 14 is a circuit diagram specifically showing the circuitconfiguration of a bit selection gate shown in FIG. 1;

FIG. 15 is a circuit diagram showing part of the circuit configurationof the memory array block shown in FIG. 1;

FIGS. 16 and 17 are circuit diagrams showing part of the circuitconfiguration of a memory array block in a type of memory module whichuses interchangeable source and bit lines;

FIGS. 18 and 19 are circuit diagrams showing part of the circuitconfiguration of a memory array block according to a third preferredembodiment of the present invention; and

FIGS. 20 and 21 are top views showing, in partial cutaway, a layoutpattern of a memory array block according to a fourth preferredembodiment of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Preferred Embodiment

FIG. 1 is a block diagram showing the structure of an OTP (one-timeprogrammable) memory module (semiconductor memory) according to a firstpreferred embodiment of the present invention. As shown in FIG. 1, thememory module according to this first preferred embodiment includes amemory array block 1, a bit-line control circuit 2, a source-linecontrol circuit 3, a regulator circuit 4, a bit selection gate 5, asource selection gate 6, a select-gate control circuit 7, and a senseamplifier 8.

The memory array block I has a plurality of memory cells arranged in amatrix of rows and columns. More specifically, the memory array block 1includes a plurality of bit lines extending in the column direction, aplurality of source lines extending in the column direction, a pluralityof memory transistors each having a floating gate, and a plurality ofselect transistors each having a select gate. In each memory cell, amemory transistor and a select transistor are connected in series witheach other.

The bit-line control circuit 2 outputs a bit-line selection signal forselecting a bit line which corresponds to a memory cell to be accessed,on the basis of an input signal from the outside of the memory module.The source-line control circuit 3 outputs a source-line selection signalfor selecting a source line which corresponds to a memory cell to beaccessed, on the basis of an input signal from the outside of the memorymodule. If all the columns of the memory array use a common source line,the source-line control circuit 3 can be omitted.

The regulator circuit 4, in each case of data reading and writing fromand to a memory cell, determines a voltage value to be supplied to thememory cell and outputs that voltage. The source selection gate 6includes a plurality of transistors and turns on required transistorsaccording to the source-line selection signal inputted from thesource-line control circuit 3 to select a source line corresponding to amemory cell to be accessed. Thereby, the voltage outputted from theregulator circuit 4 is supplied through the source line selected by thesource selection gate 6 to the memory cell to be accessed.

The sense amplifier 8, in data reading, detects a voltage outputted fromthe accessed memory cell to determine whether data stored in that memorycell is “0” or “1”. The bit selection gate 5 includes a plurality oftransistors and turns on required transistors according to the bit-lineselection signal inputted from the bit-line control circuit 2 to selecta bit line corresponding to a memory cell to be accessed. For example indata reading, the voltage outputted from the accessed memory cell istransmitted through a bit line selected by the bit selection gate 5 tothe sense amplifier 8.

The select-gate control circuit 7, in order to turn on the selecttransistor in a memory cell to be accessed, applies a gate voltage to aselect gate corresponding to that memory cell.

FIGS. 2 and 3 are top views showing, in partial cutaway, a layoutpattern of the memory array block 1 according to the first preferredembodiment of the present invention. To clearly show the arrangementpattern of the floating gates 103, FIG. 2 omits metal interconnect lines105 and 107 shown in the structure of FIG. 3. In FIGS. 2 and 3, the Xdirection corresponds to the row direction; the Y directionperpendicular to the X direction corresponds to the column direction;and the Z direction perpendicular to both the X and Y directionscorresponds to the height direction. The same applies to the followingdrawings.

Referring to FIG. 2, an isolation insulating film 101 and an impuritydiffusion region 102 are formed in the upper surface of a siliconsubstrate 110 (see FIG. 4; described below). The isolation insulatingfilm 101 is made of, for example, silicon dioxide. Further, a pluralityof select gates 104 extend in lines in the X direction. FIG. 2 shows twoselect gates 104. Between the upper- and lower-side select gates 104,two rows' worth of the floating gates 103 (including 103 s and 103 t)are located. FIG. 2 shows six floating gates 103, out of which the upperthree floating gates 103 are coupled with the upper-side select gate104, and the lower three floating gates 103 are coupled with thelower-side select gate 104.

As shown in FIG. 2, the plurality of floating gates 103 are placed in astaggered arrangement (in other words, in a zigzag pattern). Morespecifically, looking at one floating gate 103 (e.g., 103 s) in aspecific column and another floating gate 103 (e.g., 103 t) in a columnadjacent to that specific column, those floating gates 103 s and 103 tdeviate from each other in the Y direction. The right end of thefloating gate 103 s and the left end of the floating gate 103 t overlapeach other in the X direction.

Referring to FIG. 3, the plurality of metal interconnect lines 107serving as bit lines are arranged in columns. The metal interconnectlines 107 are made of, for example, aluminum. The metal interconnectlines 107 extend in the Y direction and are in contact with the uppersurface of the impurity diffusion region 102 through contact holes 108between the upper and lower floating gates 103.

Further, the metal interconnect lines 105 of, for example, aluminumextend in the Y direction. The metal interconnect lines 105 are incontact with the upper surface of the impurity diffusion region 102through contact holes 106. They serve as source lines.

FIG. 4 is a cross-sectional view showing a sectional structure takenalong line IV-IV of FIG. 3. In the upper surface of the siliconsubstrate 110, the impurity diffusion region 102 is partially formed.The conductivity type of the impurity diffusion region 102 is, forexample, P-type. On the upper surface of the silicon substrate 110, agate insulating film 111 is partially formed. The gate insulating film111 is made of, for example, silicon dioxide. On the gate insulatingfilm 111, the floating gates 103 or the select gates 104 are formed. Thefloating gates 103 and the select gates 104 are made of, for example,polysilicon. The floating gates 103 serve as the gate electrodes of thememory transistors 115, and the select gates 104 as the gate electrodesof the select transistors 116. The impurity diffusion region 102 servesas the source/drain region of each of the memory transistors 115 and theselect transistors 116.

An interlayer insulating film 112 is formed to cover the memorytransistors 115 and the select transistors 116. The interlayerinsulating film 112 is made of, for example, silicon dioxide. On theupper surface of the interlayer insulating film 112, the metalinterconnect lines 107 are formed. In the interlayer insulating film112, the contact holes 108 are partially formed to penetrate theinterlayer insulating film 112 from the upper to the bottom surfaces.Through the contact holes 108, the metal interconnect lines 107 are incontact with the upper surface of the impurity diffusion region 102between each two floating gates 103.

FIG. 5 is a circuit diagram showing the equivalent circuit of one memorycell. The source of the select transistor 116 is connected through themetal interconnect line 105 to the regulator circuit 4 (or the sourceselection gate 6) shown in FIG. 1. The gate electrode (select gate 104)of the select transistor 116 is connected to the select-gate controlcircuit 7 shown in FIG. 1. The drain of the select transistor 116 isconnected to the source of the memory transistor 115. The gate electrode(floating gate 103) of the memory transistor 115 is connected tonowhere. The drain of the memory transistor 115 is connected through themetal interconnect line 107 to the sense amplifier 8 (or the bitselection gate 5) shown in FIG. 1.

As shown in FIG. 2, the memory module according to the first preferredembodiment has the plurality of floating gates 103 in a staggeredarrangement. Thus, it can reduce the area of the memory array block 1without reducing the gate widths of the floating gates 103, as comparedto a conventional memory module shown in FIG. 6.

More specifically, in the conventional memory module shown in FIG. 6, aplurality of floating gates 103 belonging to one row are placed side byside in a straight line. Thus, a space of more than a design rule D mustbe left between each two adjacent floating gates 103, which results inthe increased area of the memory array block 1. On the other hand, inthe memory module according to this first preferred embodiment shown inFIG. 2, the plurality of floating gates 103 are arranged in staggeredlines. Thus, it is possible to lessen the space between each twoadjacent floating gates while maintaining the gate width W1 (cf. FIG. 2)of the floating gates 103 at almost the same value as the gate width W2(cf. FIG. 6) of the floating gates 103 in the conventional memorymodule. As a result, the area of the memory array block 1 can bereduced. Alternatively, instead of lessening the space between each twoadjacent floating gates, the gate width W1 of the floating gates 103 maybe increased, in which case the effect of increased current flowing fromthe memory cell is achieved.

Second Preferred Embodiment

This second preferred embodiment provides a memory module which usesinterchangeable source and bit lines.

FIGS. 7 to 9 are top views showing, in partial cutaway, a layout patternof the memory array block 1 according to the second preferred embodimentof the present invention. To clearly show the arrangement pattern ofmetal interconnect lines 120, FIG. 8 omits metal interconnect lines 122shown in the structure of FIG. 9. Further to clearly show thearrangement pattern of the floating gates 103, FIG. 7 omits the metalinterconnect lines 120 shown in the structure of FIG. 8. A block diagramshowing the entire structure of the memory module is identical to thatof FIG. 1.

Referring to FIG. 7, in the upper surface of the silicon substrate 110,the isolation insulating film 101 and the impurity diffusion region 102(including 102 a) are formed. The plurality of select gates 104(including 104 a and 104 b) extend in lines in the X direction. Betweeneach two adjacent select gates 104, one row's worth (two lines) offloating gates 103 (including 103 a and 103 b) are located. As shown inFIG. 7, the plurality of floating gates 103 are placed in a staggeredarrangement.

Referring to FIG. 8, the plurality of metal interconnect lines 120(including 120 a, 120 b, and 120 c) are arranged as first-layerinterconnection. The metal interconnect lines 120 are made of, forexample, aluminum. The metal interconnect lines 120 are in contact withthe impurity diffusion region 102 through contact holes 121 (including121 a, 121 b, 121 c, 121 d, and 121 e). For example, the metalinterconnect line 120 a is in contact with the impurity diffusion region102 a through the contact hole 121 b and in contact with the impuritydiffusion region 102 through the contact hole 121 a. The metalinterconnect line 120 b is in contact with the impurity diffusion region102 a through the contact hole 121 c and in contact with the impuritydiffusion region 102 through the contact hole 121 d.

Referring to FIG. 9, the plurality of metal interconnect lines 122(including 122 a and 122 b) serving as source or bit lines are arrangedin columns as second-layer interconnection. As an alternative, thosemetal interconnect lines 122 may be divided between two interconnectlayers and alternately arranged with even-numbered ones as second-layerinterconnection and odd-numbered ones as third-layer interconnection.This prevents interference of current between each adjacent memory cellsand avoids misjudgment by the sense amplifier 8 without application ofthe feature of the present invention described in the subsequent thirdpreferred embodiment.

The metal interconnect lines 122 are made of, for example, aluminum. Themetal interconnect lines 122 extend in the Y direction and are incontact with the metal interconnect lines 120 through via holes 123(including 123 a, 123 b, and 123 c). For example, the metal interconnectline 122 a is in contact with the metal interconnect line 120 a throughthe via hole 123 a and in contact with the metal interconnect line 120 cthrough the via hole 123 c. The metal interconnect line 122 b is incontact with the metal interconnect line 120 b through the via hole 123b.

FIG. 10 is a cross-sectional view showing a sectional structure takenalong line X-X of FIG. 9. In the upper surface of the silicon substrate110, the impurity diffusion region 102 is partially formed. On the uppersurface of the silicon substrate 110, the gate insulating film 111 ispartially formed, on which the floating gates 103 or the select gates104 are formed. Then, an interlayer insulating film 124 is formed tocover the memory transistors 15 and the select transistors 116. Theinterlayer insulating film 124 is made of, for example, silicon dioxide.On the upper surface of the interlayer insulating film 124, the metalinterconnect lines 120 are formed. In the interlayer insulating film124, the contact holes 121 are partially formed to penetrate theinterlayer insulating film 124 from the upper to the bottom surfaces.Through the contact holes 121, the metal interconnect lines 120 are incontact with the upper surface of the impurity diffusion region 102. Onthe upper surface of the interlayer insulating film 124, an interlayerinsulating film 125 is formed to cover the metal interconnect lines 120.The interlayer insulating film 125 is made of, for example, silicondioxide.

FIG. 11 is a cross-sectional view showing a sectional structure takenalong line XI-XI of FIG. 9. In the upper surface of the siliconsubstrate 110, the isolation insulating film 101 is formed. On the uppersurface of the isolation insulating film 101, the floating gates 103 andthe select gates 104 are formed. Also on the upper surface of theisolation insulating film 101, the interlayer insulating film 124 isformed to cover the floating gates 103 and the select gates 104. On theupper surface of the interlayer insulating film 124, the metalinterconnect lines 120 are formed. Also on the upper surface of theinterlayer insulating film 124, the interlayer insulating film 125 isformed to cover the metal interconnect lines 120. On the upper surfaceof the interlayer insulating film 125, the metal interconnect lines 122are formed. In the interlayer insulating film 125, the via holes 123 arepartially formed to penetrate the interlayer insulating film 125 fromthe upper to the bottom surfaces. Through the via holes 123, the metalinterconnect lines 122 are in contact with the upper surfaces of themetal interconnect lines 120.

FIG. 12 is a circuit diagram showing the equivalent circuit of onememory cell. The source of the select transistor 116 is connectedthrough the metal interconnect line 122 in a specific column to theregulator circuit 4 (or the source selection gate 6) shown in FIG. 1.The gate electrode (select gate 104) of the select transistor 116 isconnected to the select-gate control circuit 7 shown in FIG. 1. Thedrain of the select transistor 116 is connected to the source of thememory transistor 115. The gate electrode (floating gate 103) of thememory transistor 115 is connected to nowhere. The drain of the memorytransistor 115 is connected through the metal interconnect line 122 in acolumn adjacent to the above specific column to the sense amplifier 8(or the bit selection gate 5) shown in FIG. 1.

Referring to FIGS. 8 and 9, for example when a memory cell including thefloating gate 103 a and the select gate 104 a is being accessed, themetal interconnect line 122 a serves as a source line, and the metalinterconnect line 122 b as a bit line. More specifically, a sourcepotential is supplied from the metal interconnect line 122 a through thevia hole 123 a, the metal interconnect line 120 a, and the contact hole121 b in this order to the impurity diffusion region 102 a (the sourceof the select transistor 116). The output voltage of the memory cell istransmitted from the impurity diffusion region 102 a (the drain of thememory transistor 115) through the contact hole 121 c, the metalinterconnect line 120 b, and the via hole 123 b in this order to themetal interconnect line 122 b.

Conversely, when a memory cell including the floating gate 103 b and theselect gate 104 b is being accessed, the metal interconnect line 122 bserves as a source line, and the metal interconnect line 122 a as a bitline. More specifically, a source potential is supplied from the metalinterconnect line 122 b through the via hole 123 b, the metalinterconnect line 120 b, and the contact hole 121 c in this order to theimpurity diffusion region 102 a (the source of the select transistor116). The output voltage of the memory cell is transmitted from theimpurity diffusion region 102 a (the drain of the memory transistor 115)through the contact hole 121 e, the metal interconnect line 120 c, andthe via hole 123 c in this order to the metal interconnect line 122 a.

In this way, the memory module according to this second preferredembodiment uses interchangeable source and bit lines which can beexchanged with each other depending on the memory cell to be accessed.

Hereinbelow, a detailed description is given of the reading of datastored in a memory cell.

FIG. 13 is a circuit diagram specifically showing the circuitconfiguration of the source selection gate 6 shown in FIG. 1. FIG. 14 isa circuit diagram specifically showing the circuit configuration of thebit selection gate 5 shown in FIG. 1. FIGS. 13 and 14 are contiguous toeach other along the dash dotted line. FIG. 15 is a circuit diagramshowing part of the circuit configuration of the memory array block 1shown in FIG. 1.

In the example shown in FIG. 13, the source selection gate 6 is dividedinto two groups each corresponding to eight (8 bits of) memory cellsbelonging to one row. Similarly, in the example shown in FIG. 14, thebit selection gate 5 is divided into two groups each corresponding to 8bits of memory cells belonging to one row.

Firstly, the reading of data stored in a memory cell 20 shown in FIG. 15is described. In this case, a signal line b3 shown in FIG. 15 serves asa source line, and a signal line b2 as a bit line. Thus, the source-linecontrol circuit 3 shown in FIG. 1 applies a “L (Low)” voltage(source-line selection signal) to signal lines P1 and P9 to turn on PMOStransistors 11 and 12 connected to the signal line b3 in FIG. 13.Thereby, the voltage outputted from the regulator circuit 4 is suppliedthrough the PMOS transistors 12 and 11 in this order to the memory cell20. At this time, the source-line control circuit 3 in FIG. 1 applies a“H (High)” voltage to signal lines P0, P2-P8, and P10-P12, so that alltransistors in the source selection gate 6 except the PMOS transistors11 and 12 are turned off.

Also in the reading of data stored in the memory cell 20, the bit-linecontrol circuit 2 shown in FIG. 1 applies a “H” voltage (bit-lineselection signal) to signal lines N5 and N13 to turn on NMOS transistors13 and 14 connected to the signal line b2 in FIG. 14. Thereby, a currentfrom the memory cell 20 flows through the NMOS transistors 13 and 14 inthis order and is detected by the sense amplifier 8. At this time, thebit-line control circuit 2 in FIG. 1 applies a “L” voltage to signallines N0-N4, N6-N12, and N14-N16, so that all transistors in the bitselection gate 5 except the NMOS transistors 13 and 14 are turned off.

Next described is the reading of data stored in a memory cell 21 shownin FIG. 15. In this case, the signal line b2 shown in FIG. 15 serves asa source line, and the signal line b3 as a bit line. Thus, thesource-line control circuit 3 in FIG. 1 applies a “L” voltage to thesignal lines P5 and P9 to turn on PMOS transistors 12 and 17 connectedto the signal line b2 in FIG. 13. Thereby, the output voltage of theregulator circuit 4 is supplied through the PMOS transistors 12 and 17in this order to the memory cell 21. At this time, the source-linecontrol circuit 3 in FIG. 1 applies a “H” voltage to the signal linesP0-P4, P6-P8, and P10-P12, so that all the transistors in the sourceselection gate 6 except the PMOS transistors 12 and 17 are turned off.

Also in the reading of data stored in the memory cell 21, the bit-linecontrol circuit 2 in FIG. 1 applies a “H” voltage to the signal lines N1and N13 to turn on NMOS transistors 14 and 18 connected to the signalline b3 in FIG. 14. Thereby, a current from the memory cell 21 flowsthrough the NMOS transistors 18 and 14 in this order and is detected bythe sense amplifier 8. At this time, the bit-line control circuit 2 inFIG. 1 applies a “L” voltage to the signal lines N0, N2-N12, andN14-N16, so that all the transistors in the bit selection gate 5 exceptthe NMOS transistors 14 and 18 are turned off.

Similarly, in the reading of data stored in memory cells connected to asignal line b7 in FIG. 15, a signal line b8 serves as a source or bitline. Thus, when memory cells are divided into groups of 8 bits, it isnecessary to add, for every 8 bits, one PMOS and one NMOS transistorsboth connected to the signal line b8 to the source selection gate 6 andthe bit selection gate 5, respectively. If memory cells are not dividedinto such groups of 8 bits, such additional PMOS and NMOS transistorsare unnecessary.

Hereinbelow, descriptions are given of the select-gate control circuit7, the source-line control circuit 3, and the bit-line control circuit 2shown in FIG. 1. In order to turn on the select transistor 116 in amemory cell to be accessed, the select-gate control circuit 7 applies agate voltage to the select gate 104 corresponding to that memory cellaccording to address data inputted from the outside of the memorymodule.

The source-line control circuit 3, according to the address datainputted from the outside of the memory module, generates and outputsthe source selection signal for turning on transistors corresponding toa memory cell to be accessed, out of a plurality of PMOS transistors inthe source selection gate 6. For this, the source-line control circuit 3includes a logic circuit for setting a signal as corresponding to/{(A3*A4B)*A5B} when the address of the memory cell 20 shown in FIG. 15is, for example, “0010” (in hexadecimal). Here, A3 to A5 each representbit data of the address, with A3 representing address A[3], A4representing address A[4], and A5 representing address A[5].

Similarly, the bit-line control circuit 2, according to the address datainputted from the outside of the memory module, generates and outputs abit selection signal for turning on transistors corresponding to amemory cell to be accessed, out of a plurality of NMOS transistors inthe bit selection gate 5. For this, the bit-line control circuit 2includes a logic circuit for setting a signal as corresponding to{(A2*A3B*A4B)+(A2B*A3*A4B)}*A5B when the address of the memory cell 20shown in FIG. 15 is, for example, “0010” (in hexadecimal).

Also, in order to transmit only the current flowing from a memory cellto the sense amplifier 8, the source-line control circuit 3 and thebit-line control circuit 2 have the discharge function of drawing chargecapacities of all memory cells in the memory array block 1 prior to thestart of data reading. During discharge, the source-line control circuit3 have all the PMOS transistors in the source selection gate 6 turnedoff, and the bit-line control circuit 2 have all the NMOS transistors inthe bit selection gate 5 turned on.

Hereinbelow, the writing of data to a memory cell will be described indetail.

Firstly, data writing to the memory cell 20 shown in FIG. 15 isdescribed. In this case, the signal line b3 shown in FIG. 15 serves as asource line, and the signal line b2 as a bit line. Thus, the source-linecontrol circuit 3 in FIG. 1 applies a “L” voltage to the signal lines P1and P9 to turn on the PMOS transistors 11 and 12 connected to the signalline b3 in FIG. 13. Thereby, a write voltage outputted from theregulator circuit 4 is supplied through the PMOS transistors 12 and 11in this order to the memory cell 20 (more specifically, the source ofthe select transistor 116 in the memory cell 20). At this time, thesource-line control circuit 3 in FIG. 1 applies a “H” voltage to thesignal lines P0, P2-P8, and P10-P12, so that all the transistors in thesource selection gate 6 except the PMOS transistors P11 and 12 areturned off.

Further in the data writing to the memory cell 20, the bit-line controlcircuit 2 in FIG. 1 applies a “H” voltage to the signal lines N0, N4,N5, and N9 to turn on the NMOS transistors 13, 15, and 16 shown in FIG.14. Thereby, a current for writing data to the memory cell 20 flowsthrough the NMOS transistors 13 and 15. At this time, the bit-linecontrol circuit 2 in FIG. 1 applies a “L” voltage to the signal linesN1-N3, N6-N8, and N10-N16, so that all the transistors in the bitselection gate 5 except the NMOS transistors 13, 15, and 16 are turnedoff.

Here, the reason why the NMOS transistors 16 are turned on in the datawriting to the memory cell 20 is as follows. Referring to FIG. 15, inthe data writing to the memory cell 20, select transistors 116 in memorycells 22 are turned on as well as the select transistor 116 in thememory cell 20. Further, the current from the memory cell 20 flows alsoto the memory cells 22 through the signal line b2. This results in anincrease in the potentials of the memory cells 22 (more specifically thedrain potentials of the memory transistors 115 or the select transistors116 in the memory cells 22). To prevent this, in the data writing to thememory cell 20, the NMOS transistors 16 are turned on to draw chargeflowing from the memory cell 20 to the memory cells 22.

Next, data writing to the memory cell 21 shown in FIG. 15 is described.In this case, the signal line b2 shown in FIG. 15 serves as a sourceline, and the signal line b3 as a bit line. Thus, the source-linecontrol circuit 3 in FIG. 1 applies a “L” voltage to the signal lines P5and P9 to turn on the PMOS transistors 12 and 17 connected to the signalline b2 in FIG. 13. Thereby, the write voltage outputted from theregulator circuit 4 is supplied through the PMOS transistors 12 and 17in this order to the memory cell 21. At this time, the source-linecontrol circuit 3 in FIG. 1 applies a “H” voltage to the signal linesP0-P4, P6-P8, and P10-P12, so that all the transistors in the sourceselection gate 6 except the PMOS transistors 12 and 17 are turned off.

Further in the data writing to the memory cell 21, the bit-line controlcircuit 2 in FIG. 1 applies a “H” voltage to the signal lines N1-N3 andN6-N9 to turn on the NMOS transistors 15, 18, and 19 shown in FIG. 14.Thereby, a current for writing data to the memory cell 21 flows throughthe NMOS transistors 15 and 18. At this time, the bit-line controlcircuit 2 in FIG. 1 applies a “L” voltage to the signal lines N0, N4,N5, and N10-N16, so that all the transistors in the bit selection gate 5except the NMOS transistors 15, 18, and 19 are turned off.

Here, the reason why the NMOS transistors 19 are turned on in the datawriting to the memory cell 21 is as follows. Referring to FIG. 15, inthe data writing to the memory cell 21, select transistors 116 in memorycells 23 are turned on as well as the select transistor 116 in thememory cell 21. Further, the current from the memory cell 21 flows alsoto the memory cells 23 through the signal line b3. This results in anincrease in the potentials of the memory cells 23 (more specifically,the drain potentials of the memory transistors 115 or the selecttransistors 116 in the memory cells 23). To prevent this, in the datawriting to the memory cell 21, the NMOS transistors 19 are turned on todraw charge flowing from the memory cell 21 to the memory cells 23.

As shown in FIG. 7, the memory module according to this second preferredembodiment, like that shown in FIG. 2 according to the aforementionedfirst preferred embodiment, has the plurality of floating gates 103 in astaggered arrangement. Thus, it can achieve the effect of reducing thearea of the memory array block 1 without reducing the gate widths of thefloating gates 103, like the memory module according to theaforementioned first preferred embodiment.

Besides, since the source and bit lines are interchangeable, the area ofthe memory array block 1 can be reduced as compared with the case wherea plurality of metal interconnect lines serving only as source lines anda plurality of metal interconnect lines serving only as bit lines areseparately provided.

Third Preferred Embodiment

FIGS. 16 and 17 are circuit diagrams showing part of the circuitconfiguration of the memory array block 1 in a type of memory modulewhich uses interchangeable source and bit lines as in the aforementionedsecond preferred embodiment or as in the subsequent fourth preferredembodiment. In the example shown in FIG. 16, a memory cell 50 is aselected memory cell to be accessed, in which case a signal line 53serves as a source line, and a signal line 51 as a bit line. Also inFIG. 16, a memory cell 54 is a non-selected memory cell which is notaccessed but whose select transistor 116 is turned on as that of thememory cell 50. Signal lines 52 are signal lines connected tonon-selected memory cells.

In the example shown in FIG. 16, a substrate potential (i.e., thepotential applied to the silicon substrate 110 shown in FIGS. 10 and 11)is 5.0 V, a voltage supplied from the source line is also 5.0 V, and theinitial potential of the signal line 52 is 2.4 V. In this case, when thepotential of the bit line (signal line 51) increases to 2.5V resultingfrom data reading from the memory cell 50, part of current from thememory cell 50 will flow to the signal line 52 having a lower potentialthan the bit line. As a result, the amount of current flowing to thesense amplifier 8 is reduced, which becomes a cause of misjudgment.

In the example shown in FIG. 17, the substrate potential is 5.0 V, thevoltage supplied from the source line is also 5.0 V, the initialpotential of the signal line 52 is 2.4V, and the potential of the bitline is 2.5 V. In this case, if the potential of the signal line 52increases to 2.6 V due to any cause, a current flows from the signalline 52 to the bit line. As a result, a current flowing to the senseamplifier 8 is increased, which becomes a cause of misjudgment. Also, aleakage current of the memory transistor 115 flows to the bit line,which also becomes a cause of misjudgment by the sense amplifier 8.

In view of the foregoing, this third preferred embodiment describes amemory module which can prevent the aforementioned harmful effects.

FIGS. 18 and 19 are circuit diagrams showing, in correspondence withFIGS. 16 and 17, part of the circuit configuration of the memory arrayblock 1 according to the third preferred embodiment of the presentinvention. In the example shown in FIG. 18, a memory cell 60 is aselected memory cell to be accessed, in which case a signal line 63serves as a source line, and a signal line 61 as a bit line. Also inFIG. 18, a memory cell 64 is a non-selected memory cell which is notaccessed but whose select transistor 116 is turned on as that of thememory cell 60. Signal lines 62 are signal lines connected tonon-selected memory cells.

In the example shown in FIG. 18, the substrate potential is 5.0 V, and avoltage supplied from the source line (source potential) for access tothe memory cell 60 is 2.5 V which is lower than the substrate potential.The initial potential of the signal line 62 is 0.9 V. In this case, evenif the potential of the bit line (signal line 61) increases to 1.0 Vresulting from data reading from the memory cell 60, little current willflow from the memory cell 60 to the memory cell 64 because of the bodyeffect (substrate bias effect). That is, since the substrate potentialis 5.0 V and higher than the source potential of 2.5 V of the selecttransistor 116, the threshold voltage of the select transistor 116 isincreased by the body effect. As a result, a current flowing from thebit line to the signal line 62 becomes nearly equal to zero.

The source potential of 2.5 V is generated by a power supply voltage of5.0 V in the regulator circuit 4 shown in FIG. 1. The regulator circuit4 also has the function of controlling a voltage between the source anddrain of the memory transistor 115 to be always within 2.4 V, in orderto prevent the occurrence of unintended data writing due to excessivecurrent flow to the memory cells.

In the example shown in FIG. 19, the substrate potential is 5.0 V, thesource potential is 2.5 V, the initial potential of the signal line 62is 0.9 V, and the potential of the bit line is 1.0 V. In this case, evenif the potential of the signal line 62 increases to 1.1 V due to anycause, little current will flow from the signal line 62 to the bit linebecause the threshold voltage of the select transistor 116 is increasedby the body effect. Besides, a leakage current of the memory transistor115 is also reduced, since the threshold voltage of the memorytransistor 115 is also increased by the body effect.

In this way, in the memory module according to this third preferredembodiment, for access to a selected memory cell, a potential lower thanthe substrate potential is supplied from the regulator circuit 4 to theselected memory cell. Accordingly, the threshold voltages of both thememory transistor 115 and the select transistor 116 are increased by thebody effect. This prevents the increase or decrease in the current flowfrom the bit line to the sense amplifier 8 caused by interference ofnon-selected memory cells adjacent to the selected memory cell or by theleakage current of the memory transistor 115. Consequently, misjudgmentby the sense amplifier 8 can be avoided.

Fourth Preferred Embodiment

FIGS. 20 and 21 are top views showing, in partial cutaway, a layoutpattern of the memory array block 1 according to a fourth preferredembodiment of the present invention. To clearly show the arrangementpattern of floating gates 130, FIG. 20 omits metal interconnect lines132 a, 132 b, and 132 c in the structure shown in FIG. 21.

Referring to FIG. 20, meandering select gates 131 a and 131 b and aplurality of floating gates 130 (including 130 a and 130 b) coupled withthe select gates 131 a and 131 b are arranged. The floating gates 130include those which are arranged to have their gate widths defined alongthe X direction (e.g., the floating gate 130 a) and those which arearranged to have their gate widths defined along the Y direction (e.g.,the floating gate 130 b).

Referring to FIG. 21, the plurality of metal interconnect lines 132 a to132 c serving as source or bit lines are arranged in columns extendingin the Y direction as first-layer interconnection. As an alternative,those metal interconnect lines 132 a to 132 c may be divided between twointerconnect layers and alternately arranged with even-numbered ones asfirst-layer interconnection and odd-numbered ones as second-layerinterconnection. This prevents interference of current between eachadjacent memory cells and avoids misjudgment by the sense amplifier 8without application of the feature of the present invention described inthe above third preferred embodiment. The metal interconnect lines 132 ato 132 c are made of, for example, aluminum.

The metal interconnect lines 132 a to 132 c are in contact with theupper surface of the impurity diffusion region 102 through contact holes133 (including 133 a, 133 b, 133 c), contact holes 134 (including 134 a,134 b, 134 c), and metal interconnect lines not shown. Morespecifically, the metal interconnect line 132 a is connected to thecontact holes 133 a and 134 a, the metal interconnect line 132 b to thecontact holes 133 b and 134 b, and the metal interconnect line 132 c tothe contact holes 133 c and 134 c.

Referring to FIG. 21, for example when a memory cell including thefloating gate 130 a and the select gate 131 a is being accessed, themetal interconnect line 132 b serves as a source line, and the metalinterconnect line 132 c as a bit line. More specifically, a sourcepotential is supplied from the metal interconnect line 132 b through thecontact hole 133 b to the impurity diffusion region 102 (the source ofthe select transistor 116), and the output voltage of the memory cell istransmitted from the impurity diffusion region 102 (the drain of thememory transistor 115) through the contact hole 134 c to the metalinterconnect line 132 c.

Conversely, when a memory cell including the floating gate 130 b and theselect gate 131 b is being accessed, the metal interconnect line 132 aserves as a source line, and the metal interconnect line 132 b as a bitline. More specifically, a source potential is supplied from the metalinterconnect line 132 a through the contact hole 134 a to the impuritydiffusion region 102 (the source of the select transistor 116), and theoutput voltage of the memory cell is transmitted from the impuritydiffusion region 102 (the drain of the memory transistor 115) throughthe contact hole 134 b to the metal interconnect line 132 b.

In this way, the memory module according to this fourth preferredembodiment has the meandering select gates 131 a and 131 b and theplurality of floating gates 130 arranged along respective sides of themeandering select gates 131 a and 131 b. Thus, it can reduce the area ofthe memory array block 1 without reducing the gate widths of thefloating gates 130, as compared to the conventional memory module shownin FIG. 6.

While the invention has been shown and described in detail, theforegoing description is in all aspects illustrative and notrestrictive. It is therefore understood that numerous modifications andvariations can be devised without departing from the scope of theinvention.

1. A semiconductor memory comprising: a select gate extending in a firstdirection; and a plurality of floating gates coupled with said selectgate; said plurality of floating gates including: a first floating gate;and a second floating gate arranged adjacent to said first floating gateand deviating from said first floating gate in a second directionperpendicular to said first direction.
 2. The semiconductor memoryaccording to claim 1, further comprising: a plurality of memory cellssharing said select gate and each having one of said plurality offloating gates; a plurality of transistors connected respectively tooutputs of said plurality of memory cells; and a control circuit forcontrolling drive of said plurality of transistors, said plurality ofmemory cells including first and second memory cells, said plurality oftransistors including first and second transistors, wherein, in datawriting to said first memory cell, said control circuit turns on, out ofsaid plurality of transistors, said first transistor connected to saidfirst memory cell and said second transistor connected to said secondmemory cell to which current flows from said first memory cell.
 3. Thesemiconductor memory according to claim 1, further comprising: asubstrate having a major surface on which said select gate and saidplurality of floating gates are formed respectively through gateinsulating films; a plurality of memory cells sharing said select gateand each having one of said plurality of floating gates; and a potentialsupply circuit for supplying a potential to said plurality of memorycells, wherein, for access to a selected memory cell selected from saidplurality of memory cells, said potential supply circuit supplies apotential lower than a potential applied to said substrate to saidselected memory cell.
 4. The semiconductor memory according to claim 1,further comprising: a plurality of interconnect lines selectivelyserving as source or bit lines depending on a memory cell to beaccessed.
 5. The semiconductor memory according to claim 4, wherein saidplurality of interconnect lines include: a first interconnect lineformed in a first interconnect layer; and a second interconnect lineformed adjacent to said first interconnect line in a second interconnectlayer which is different from said first interconnect layer.
 6. Asemiconductor memory comprising: a select gate formed in a meanderingpattern; and a plurality of floating gates coupled with said selectgate, said plurality of floating gates including: a first floating gatearranged to have its gate width defined along a first direction; and asecond floating gate arranged to be adjacent to said first floating gateand to have its gate width defined along a second directionperpendicular to said first direction.
 7. The semiconductor memoryaccording to claim 6, further comprising: a plurality of memory cellssharing said select gate and each having one of said plurality offloating gates; a plurality of transistors connected respectively tooutputs of said plurality of memory cells; and a control circuit forcontrolling drive of said plurality of transistors, said plurality ofmemory cells including first and second memory cells, said plurality oftransistors including first and second transistors, wherein, in datawriting to said first memory cell, said control circuit turns on, out ofsaid plurality of transistors, said first transistor connected to saidfirst memory cell and said second transistor connected to said secondmemory cell to which current flows from said first memory cell.
 8. Thesemiconductor memory according to claim 6, further comprising: asubstrate having a major surface on which said select gate and saidplurality of floating gates are formed respectively through gateinsulating films; a plurality of memory cells sharing said select gateand each having one of said plurality of floating gates; and a potentialsupply circuit for supplying a potential to said plurality of memorycells, wherein, for access to a selected memory cell selected from saidplurality of memory cells, said potential supply circuit supplies apotential lower than a potential applied to said substrate to saidselected memory cell.
 9. The semiconductor memory according to claim 6,further comprising: a plurality of interconnect lines selectivelyserving as source or bit lines depending on a memory cell to beaccessed.
 10. The semiconductor memory according to claim 9, whereinsaid plurality of interconnect lines include: a first interconnect lineformed in a first interconnect layer; and a second interconnect lineformed adjacent to said first interconnect line in a second interconnectlayer which is different from said first interconnect layer.